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3D white-light interferometry
Two economical microscopes called smartWLI-prime
and smartWLI-extended as well as an upgrade to existing microscopes
called smartWLI-microscope are available.
The strength of these instruments is the economical
price as well as an extremely fast calculation algorithm.
Principal features:
- Non-contact
- Nanometer accuracy
- Fast
- Reliable
White-light interferometry is among the proven
optical measurement techniques for recording 3-D topographies
with depth resolution in the lower nanometre range. Because the
measurement points are acquired and processed in parallel, the
height information can be gathered over a large area in a very
short time. Typical applications in research and in quality management
are the characterisation of surfaces with different roughness
values (wafer structures, mirrors, glass, metals), the determination
of step heights and the precise measurement of curved surfaces,
such as microlenses. The product family smartWLI offers innovative
solutions utilising this measurement principle. The control and
analysis of the entire measurement process is done using the proven
smartWLI software. The efficient, robust and highly accurate analysis
algorithms are the result of extensive research and experience
in this area.
We supply the following types
of devices:
- smartWLI-prime (economical, compact)
- smartWLI-extended (with automatic stitching)
- smartWLI-microscope (upgrade of existing microscopes
to 3D WLI)
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